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Atomic Plane Misorientation Assisted Crystalline Quality Improvement in Epitaxial Growth of AlN on a Nanopatterned Sapphire (0001) Surface for Deep Ultraviolet Photoelectric Devices

Yong Deng,Nan Xie,Wenyu Hu,Zhenyu Ma,Fujun Xu,Longqing Chen,Wenbin Qiu,Lin Zhao,Hong Tao,Bo Wu, Yi Huang,Jian Ma,Xiaoyi Wang, Xuqi Zhang,Yang Qiu,Xudong Cui,Chaoyuan Jin,Marie-Pierre Chauvat,Pierre Ruterana,Thomas Walther

ACS APPLIED NANO MATERIALS（2023）

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