High Overtone Acoustic Resonator HBAR Based on IDT's/c-tilted ZnO/Si for Timing Applications
2022 19th International Multi-Conference on Systems, Signals & Devices (SSD)（2022）
关键词
High overtone bulk acoustic modes,HBAR resonator,piezoelectric thin film,c-tilted ZnO,Frequency characteristics
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要