Development and Optimization a Miniature Mattauch-Herzog Mass Analyzer

With the advancement of space exploration in China, mass spectrometers are becoming increasingly important in space missions. A miniature Mattauch-Herzog double focusing mass spectrometer was developed for mass analysis. Based on the study of the fringing field of the analyzer, the ion optical lens software SIMION8.1 was used to simulate the focusing performance of the ion beam. The 90 degrees magnetic analyzer with asymmetric structure is adopted, which has a magnetic flux density of 0.85T. The experiment shows that the ion current is actually affected by the fringing field of electrostatic analyzer which is basically consistent with the simulation results. Besides, the performance indicators of the miniature MS are tested, the mass resolution of N2 is 75.7, the sensitivity of N2 is 4.13 x 105 V/Pa and the minimum detectable partial pressure of N2 is 2.81 x 10-7Pa.