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Scandium-Doped Aluminum Nitride for Acoustic Wave Resonators, Filters, and Ferroelectric Memory Applications

Li Chen,Chen Liu,Minghua Li,Wendong Song,Weijie Wang,Zichu Wang,Nan Wang,Yao Zhu

ACS applied electronic materials（2022）

Cited 3|Views14
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Key words
AlScN,piezoelectric,RF,MEMS,acoustic wave resonators,acoustic wave filters,ferroelectric memory
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