Influence of AlGaN N-Type Doping and AlN Thickness on the Two-Dimensional Electron Gas Density (ns) and Resistance (R2DEG)
SOLID-STATE ELECTRONICS(2023)
摘要
•AlNpolarization is attenuated for very thin layers.•n-Doped AlGaN improves the on-state resistance due to the formation of a conductive electron channelin the AlGaN layer.•Low impact of AlGaN n-doping on the 2DEG density.
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关键词
AlGaN/AlN/GaN heterostructure,2DEG,AlN spacer,n-dopedAlGaN,Schrödinger-Poisson simulations,Measurements
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