Formation of HfOxNy Nanorod GLAD Films Growth by Rapid Thermal OxidationW. Phae-ngam,J. Prathumsit,C. Chananonnawathorn,H. Nakajima,T. Lertvanithphol,T. Pogfay, N. Limsuwan,D. Phokharatkul,A. Vora-ud,N. Triamnak,A. Mungchamnankit,M. Horprathum,P. LimsuwanVacuum（2023）引用 1|浏览10暂无评分关键词Hafnium oxynitride,Sputtering,Rapid thermal oxidation,GLAD,XPS,XASAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
