Fabrication and Characterization of In0.53Ga0.47As/InAs/In0.53Ga0.47As Composite Channel Metamorphic HEMTs (mhemts) on a GaAs Substrate
Micromachines（2022）
关键词
mHEMT,HEMT,InAs HEMT,InGaAs HEMT,Mo-based Ohmic contact,In0.53Ga0.47As/ InAs/In0.53Ga0.47As composite channel,GaAs,InGaAs/InAs/InGaAs composite channel
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