BEOL Thermal Resistance Extraction in SiGe HBTs
IEEE Transactions on Electron Devices（2022）
Key words
Resistance,Thermal resistance,Thermal conductivity,Silicon germanium,Data mining,Temperature distribution,Data models,Back-end-of-line (BEOL),compact models,parameter extraction,self-heating,silicon germanium heterojunction bipolar transistors (SiGe HBTs),thermal resistance
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