Test Structure of Bi-stable Spring Towards TopoMEMS Ising Machine

Recently, Ising Model attracts much attention for future quantum annealing computer. We are investigating the World’s first Topological Micro Electro Mechanical Systems (TopoMEMS) representation of the Ising Model. As the core component, we propose a unique “compress-and-latch” bi-stable spring structure. Two key parameters identified were an initial gap and stress relief structure. Test structures have been designed, fabricated, and parametrically tested. It was experimentally found that there exists a design window to realize 25um-stroke bistable operation with application voltage as low as 9V.