Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)（2022）
关键词
thin ald,beol-compatible,top-gated
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要