High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Lukas W. Perner,Georg Winkler,Gar-Wing Truong,David Follman,Jakob Fellinger,Maximilian Prinz,Stephan Puchegger,Garrett D. Cole,Oliver H. Heckl

Optical Interference Coatings Conference (OIC) 2022（2022）

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摘要

We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

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