Millimeter-Wave High Q-factor Sixteenth Mode SIW Cavity Resonator Implemented in 0.18-µm CMOS Technology
2022 IEEE/MTT-S International Microwave Symposium - IMS 2022(2022)
摘要
Millimeter-wave miniaturized Substrate Integrated Waveguide (SIW) cavity resonator is proposed in 0.18-µm CMOS technology. Miniaturization of the SIW cavity resonator is achieved first by taking 1/16
th
parts of the standard SIW and employing folded ridge structure. Later this folded ridge sixteenth mode SIW cavity is inductively loaded by a complementary split-ring resonator, which provides internal matching within the cavity resonator. This improved matching enhances the return loss, the external Q-factor, and ultimately, the loaded Q-factor of the proposed cavity resonator. At 60 GHz resonance frequency, the fabricated prototype of the proposed cavity resonator presents a measured reflection coefficient of −33.42 dB, with the external Q- factor 112. Moreover, the active area of the fabricated cavity without measuring pads is only 0.019 mm2
.
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关键词
cavity resonators, CMOS technology, millimeter-wave, Q-factor, substrate integrated waveguide (SIW)
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