Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.(c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement