Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Structural Changes in Nanometer-Thick Silicon-on-Insulator Films During High-Temperature Annealing

I. E. Tyschenko,E. V. Spesivtsev,A. A. Shklyaev,V. P. Popov

Semiconductors（2022）

Cited 0|Views11
No score
Key words
silicon-on-insulator,thermal stability,nanostructures,amorphization
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined