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Fabrication of Hybrid Micro-nano Structures Based on Plasma Treatment and Its Light Extraction Performances for OLED

Hong Deming,Chen Guixiong,Wang Wenwen, Zhao Jinwei,Zhou Xiongtu,Zhang Yongai,Wu Chaoxing,Guo Tailiang

ACTA PHOTONICA SINICA（2022）

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Key words
Organic light-emitting diodes,Hybrid micro-nano structures,Light extraction efficiency,Nanogratings,Microlens array,Plasma treatment
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