Hybrid simulation of radio frequency biased inductively coupled Cl2 plasmasLei Tong,Yu-Ru Zhang,Jia-Wei Huang,Ming-Liang Zhao,De-Qi Wen,Yuan-Hong Song,You-Nian WangPhysics of Plasmas(2021)引用 5|浏览4暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要