Pillar-structured 3D Inlets Fabricated by Dose-Modulated E-Beam Lithography and Nanoimprinting for DNA Analysis in Passive, Clogging-Free, Nanofluidic Devices.
Nanotechnology（2022）
关键词
3D inlets,dose modulated electron beam lithography,nanopillars,nanoimprinting,passive nanofluidic device,DNA in nanochannel,clogging-free molecular flow
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