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Nanoscale-Thick Thin Films of High-Density HfO2 for Bulk-like Optical Responses

Lirong Sun,John G. Jones,John T. Grant,Neil R. Murphy,C. Ramana,Kurt G. Eyink,Jonathan P. Vernon,Peter R. Stevenson

ACS APPLIED NANO MATERIALS（2021）

Cited 11|Views3
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Key words
amorphous HfO2,hafnium oxide,thin-film optical constants,nanoscale-thick thin films,optical properties,pulsed laser deposition,refractive index
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