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Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge

Yu Kovtun,G. P. Glazunov,V. E. Moiseenko,S. M. Maznichenko,M. N. Bondarenko,A. L. Konotopskiy,Y. Siusko,I. K. Tarasov,A. N. Shapoval,A. Lozin,V. B. Korovin,E. D. Kramskoy,M. M. Kozulya,D. Baron,V. M. Listopad,A. Yu Krasiuk

Science and innovation（2021）

Cited 1|Views39
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Key words
plasma,glow discharge,microwave discharge,stellarator,vacuum
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