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Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge

Yu Kovtun,G. P. Glazunov,V. E. Moiseenko,S. M. Maznichenko,M. N. Bondarenko,A. L. Konotopskiy,Y. Siusko,I. K. Tarasov,A. N. Shapoval,A. Lozin,V. B. Korovin,E. D. Kramskoy,M. M. Kozulya,D. Baron,V. M. Listopad,A. Yu Krasiuk

Science and innovation（2021）

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关键词
plasma,glow discharge,microwave discharge,stellarator,vacuum
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