Lithium Aluminosilicate Glass-Ceramics for Low-Temperature Anodic Sealing of MEMS SensorsR Kleimanov,I Komarevtsev,Y Enns, Y Akulshin,A Korshunov, A Shashkin, D Arefiev,A KazakinJournal of Physics Conference Series（2021）引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
