Deep open-set recognition for silicon wafer production monitoring
Pattern Recognition(2022)
摘要
•A novel solution to monitor the production of silicon wafers by Deep Learning models.•A crucial problem for semiconductor industry, challenging due to the huge input size.•We accurately address wafer monitoring as an open-set recognition problem.•Our network can process huge inputs as lists of defects, without loss of information.•We employ latent representation of our deep model to identify novel patterns.
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关键词
Pattern classification,Open-set recognition,Sparse convolutions,Quality inspection,Wafer monitoring
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