Variable shearing holography with applications to phase imaging and metrology

Light: Advanced Manufacturing(2022)

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摘要
We report variable shear interferometers employing liquid-crystal-based geometric-phase (GP) gratings. Conventional grating-based shear interferometers require two lateral shifts of the gratings to enable phase-shifting capabilities in x- and y- direction and two axial shifts of the gratings to adjust the shear amount in x- and y- direction, i.e., these systems need control of four axes mechanically. Here we show that the GP gratings combined with a pixelated polarization camera give instantaneous-phase shifting so that no mechanical movement is necessary to obtain phase shifts. Furthermore, we show that a single fixed shear with a rotational shear axis provides a more robust selection of shears while requiring the control of only one mechanical axis. We verify this statement using spatial domain and frequency domain criteria. We further show that the resolution of the reconstructed wavefield depends not only on the numerical aperture of the imaging system, the pixel size of the detector, or the spatial coherence of the source but also on the ability to determine the shear amount accurately. To improve this, we report a methodology to accurately detect the shear amounts using the second derivative of the autocorrelation function of the measured holograms, which further relaxes the requirements on mechanical stability.
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关键词
variable shearing holography,metrology,imaging,phase
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