谷歌浏览器插件
订阅小程序
在清言上使用

Coatings for Core–Shell Composite Micro‐Lattice Structures: Varying Sputtering Parameters

Advanced engineering materials(2021)

引用 1|浏览5
暂无评分
摘要
Magnetron sputtering has garnered increased attention as a versatile deposition method for generating novel core–shell composite nano‐ and micro‐lattice materials spanning a wide range of properties and functionalities. Sputtering offers an expansive material workspace consisting of a wide range of ceramics, single‐element metals, and alloy systems. However, achieving uniform coatings on such fine‐featured structures remains a challenge. Thus, herein, a foundational assessment of various sputtering configurations, cathode geometries, and deposition parameters is carried out to investigate their implications on the coating thickness and uniformity of 3D micro‐lattice scaffolds. Specifically, tetrahedral‐truss structures fabricated via direct laser writing are coated by leveraging planar and inverted cylindrical magnetron cathodes at select deposition rates, sputtering powers, and Ar working pressures. Both plasma focused ion beam and microtome sectioning techniques are employed to evaluate the cross section of individual struts and assess overall uniformity. Overall, the influence of key sputtering factors on the design and development of core–shell composite nano‐ and micro‐lattice materials is highlighted and a pathway for future sputter coating optimization on these complex structures is provided.
更多
查看译文
关键词
architected materials,coatings,core-shell composites,magnetron sputtering,microlattices
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要