System Model Extraction of MEMS Beam Resonator for Colpitts Crystal Oscillator

A complementary metal oxide semiconductormicro electro-mechanical systems (CMOS-MEMS) platform is applicable for integrating MEMS resonators and CMOS integrated circuits on a single chip. This provides a monolithic connection of MEMS with electronics. With this integration, different configurations of monolithically integrated MEMS resonators and CMOS amplifiers have been developed for commercial multi user purpose. It also provides variety of design flexibilities for resonator applications. In this paper, the design and analysis of a 2. 14MHz MEMS beam resonator for Colpitts crystal oscillator circuit is presented. A MEMS beam resonator is designed to function as an oscillator. The proposed MEMSColpitts oscillator circuit can generate 1 to 5MHz clocks, when operated in different modes. This oscillator works specifically on 2. 14MHz by macro model extraction for $9^{\mathrm{t}\mathrm{h}}$ mode only. The beam resonator requires approximately $10\mathrm{V}_{\mathrm{d}\mathrm{c}}$ to operate. The actuation was simulated in IntelliSuite (thermo-electro mechanical module). A macro model of resonator is extracted by using system model extraction (SME) and utilized in electrical circuit of Colpitts crystal oscillator. The comparison with other research works is also presented.