Surface Topography and Grain Morphology of Nanolayer TiAlN/TiSIN Coating Governed by Substrate Material and Rotation During Deposition

Vladimir Terek,Aleksandar Miletić,Lazar Kovačević,Dragan Kukuruzović,Branko Škorić,Peter Panjan,Pal Terek

Materials Proceedings（2020）

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magnetron sputtering,nanolayer coating,TiAlN/TiSiN,grain morphology,topography

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