Manufacturing High-Gradient Freeform Continuous Phase Plates (CPPs) using Magnetorheological Finishing

Joseph A. Menapace, Aaron S. Peer,Gary C. Tham

Optical Design and Fabrication 2019 (Freeform, OFT) (2019), paper JW1A.5（2019）

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摘要

Advanced MRF technology can be used to fabricate CPPs with high topographical gradients through careful selection of MRF parameters and removal functions. Appropriate figure-of-merit evaluation criteria also provide vital information to determine when imprinting is complete.

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关键词

Magnetorheological Finishing,High-Resolution Patterning,Ultra-Precision Grinding,Microcontact Printing,Microforming

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