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Optimization of furnace temperature distribution in SiC sublimation process using machine learning

Yoshiki Inoue,Tomoaki Furusho,Kentaro Kutsukake,Shunta Harada,Miho Tagawa,Toru Ujihara

The Japan Society of Applied Physics（2021）

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Key words
sic sublimation process,furnace temperature distribution,machine learning,optimization
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