Effects of deposition time on growth of Ir buffer layer on MgO(1 0 0) support layer by magnetron sputtering

Results in physics（2021）

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摘要

Variation of FWHM and Ra (surface roughness) of Ir buffer layer on MgO support layer with deposition time were found.

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关键词

Diamond,MgO,Iridium,Deposition,Magnetron sputtering,Compliant substrate

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