Ge Immersed Grating Manufacturing and Optical Verification for the METIS High-Resolution Spectrograph

Tibor Agocs,Eddy Elswijk,Daan Zaalberg, Jan Rinze Peterzon,Niels Tromp,Ivan Lloro,Jeffrey Lynn,Ramon Navarro,Takashi Sukegawa, Yukinobu Okura,Stephen P. Todd,Alistair C. H. Glasse,Philip M. Parr-Burman,Bernhard R. Brandl,Felix C. M. Bettonvil

Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation IV（2020）

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关键词
Immersed grating,germanium,METIS,mid-infrared,manufacturing,verification,wavefront error,throughput
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