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Performance Improvement of a -Ga2O3-Based Solar-Blind Metal Oxide Semiconductor Field-Effect Phototransistor Using In Situ Ozone Pretreatment Technology

IEEE Transactions on Electron Devices(2022)

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关键词
beta-Ga2O3,in situ O-3 pretreatment,metal oxide semiconductor field-effect phototransistor (SBPT),performance improvement,solar blind
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