TiO₂ Synthesis Anatase Phase with The Sol-gel Process at Room Temperature

Abstract Titanium oxide (TiO2) film was deposited on 304 stainless steel substrates using the spin coating technique. The synthesis of the deposited solution was with the sol-gel method at room temperature, using titanium isopropoxide as a precursor. Obtained film was thermally treated at temperatures of 500 °C, 550 °C and 600 °C. The X-ray diffraction (XRD) analysis confirmed the crystallinity of the film in the anatase phase, with the highest intensity at the plane (101). Moreover, the crystallite size increased with the rising temperature of the thermal treatment. The thickness of the deposited film was obtained with profilometry being: 1 µm for the 500 ºC film, 1.2 µm for the 550 ºC film, and 1.5 µm for the 600 ºC film. Raman spectroscopy measurements showed vibrational modes at 144, 399, 519 and 638 cm−1, characteristic of the TiO2 anatase phase. The obtained results showed that these films have a high potential for gas sensor applications due to their surface-to-volume ratio after obtaining the size of nanometric crystallite.