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NiPt Silicide Agglomeration Caused by Stress Relaxation along Direction in NiSi Grain

M. Mizuo, T. Yamaguchi,X. Pages,K. Vanormelingen,M. Smits,E. Granneman, M. Fujisawa, N. Hattori

Extended Abstracts of the 2014 International Conference on Solid State Devices and Materials(2014)

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