SiGe HBTs with fT/fMAX 375/510GHz Integrated in 45nm PDSOI CMOS

John Pekarik,Vibhor Jain,Crystal Kenney,Judson Holt,Shweta Khokale,Sudesh Saroop,Jeffrey B. Johnson, Kenneth Stein,Viorel Ontalus, Christopher Durcan,Mona Nafari,Tayel Nesheiwat,Sangameshwar Saudari,Elahe Yarmoghaddam,Saloni Chaurasia,Alvin Joseph

2021 IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium (BCICTS)（2021）

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关键词
SiGe HBT,NPN,PDSOI,45nm CMOS,BiCMOS,high performance SiGe
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