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Silicon Carbide Dry Etching Technique for Pressure Sensors Design

Artem A. Osipov,Gleb A. Iankevich,Armenak A. Osipov,Anastasiya B. Speshilova, Anna A. Karakchieva,Ekaterina Endiiarova, Svetlana N. Levina, Sergey Karakchiev,Sergey E. Alexandrov

Journal of manufacturing processes（2022）

Cited 4|Views1
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Key words
Deep etching,SiC plasma etching,OES,Diaphragms,3D simulation
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