Surface Ionizing Dose Deposited by Low Energy Electrons (10 Ev–10 Kev) in Eleven Monoatomic Materials: Monte Carlo Calculations and Analytical Expressions

An analytical formula for the ionizing dose of low energy electrons is proposed. The expressions have been validated for 11 monatomic elements (C, Be, Al, Si, Ti, Ni, Cu, Ge, Ag, Fe and W) and for energies ranging from 10 eV up to 14.5 keV by the use of low energy Monte Carlo simulations. These expressions can be used to evaluate the energy loss of low energy electrons as an input for other simulation codes.