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Dichroic Scanning Nonlinear Optical Microscope With Photodetecting Polymer Scanner and Objective Lens With External Back Focal Plane

IEEE Photonics Journal(2021)

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摘要
In this article authors present a prototype of a dichroic scanning nonlinear optical microscope with a photodetecting polymer Scanner and a customized objective lens with an external back focal plane. Two types of two-axis electromagnetic actuated polymer scanners are manufactured by a standard printed circuit board (PCB) fabrication process. Both scanners share the same overall dimensions of 45 mm by 45 mm. The maximum optical scan angle of a type I scanner is 13 degrees at 420 Hz by the fast axis in resonance and 4 degrees by the slow axis in the linear mode. The type II scanner shows similar performance. A scan lens as well as a tube lens in a conventional nonlinear optical microscope are replaced by placing such a polymer scanner on the external back focal plane of a customized water immersion objective lens. The objective lens has the back working distance of 6 mm, the numerical aperture of 0.7, the front working distance of 1.16 mm, a field of view of 1.67 mm in the diameter and the angle of view of +/−15 degrees. Preliminary imaging results are also presented.
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关键词
Micro and nano opto-electro-mechanical systems (MOEMS),non-linear microscopy
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