Backside Cavities for Thermal Tuning Optimization of Silicon Ring Resonators

Pierre Tissier,Karim Hassan,Vincent Reboud,Remi Velard,Philippe Grosse,Stephane Bernabe,Jean Charbonnier,Yvain Thonnart,Alexis Farcy,Fabienne Ponthenier,Benoit Charbonnier,Jean-Emmanuel Broquin

IEEE 71ST ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC 2021)（2021）

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关键词

Silicon photonics,Three-dimensional integrated circuits,Optical resonators,Thermal management

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