Bulk single crystals of -Ga2O3 and Ga-based spinels as ultra-wide bandgap transparent semiconducting oxides
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS(2021)
摘要
In the course of development of transparent semiconducting oxides (TSOs) we compare the growth and basic physical properties bulk single crystals of ultra-wide bandgap (UWBG) TSOs, namely beta-Ga2O3 and Ga-based spinels MgGa2O4, ZnGa2O4, and Zn1-xMgxGa2O4. High melting points of the materials of about 1800-1930 degrees C and their thermal instability, including incongruent decomposition of Ga-based spinels, require additional tools to obtain large crystal volume of high structural quality that can be used for electronic and optoelectronic de-vices. Bulk beta-Ga2O3 single crystals were grown by the Czochralski method with a diameter up to 2 inch, while the Ga-based spinel single crystals either by the Czochralski, Kyropoulos-like, or vertical gradient freeze / Bridgman methods with a volume of several to over a dozen cm(3). The UWBG TSOs discussed here have optical bandgaps of about 4.6-5 eV and great transparency in the UV / visible spectrum. The materials can be obtained as electrical insulators, n-type semiconductors, or n-type degenerate semiconductors. The free electron concentration (ne) of bulk beta-Ga2O3 crystals can be tuned within three orders of magnitude 10(16)-10(19) cm(-3) with a maximum Hall electron mobility (mu) of 160 cm(2)V(-1)s(-1), that gradually decreases with ne. In the case of the bulk Ga-based spinel crystals with no intentional doping, the maximum of ne and mu increase with decreasing the Mg content in the compound and reach values of about 10(20) cm(-3) and about 100 cm(2)V(-1)s(-1) (at ne > 10(19) cm(-3)), respectively, for pure ZnGa2O4.
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关键词
beta-Ga2O3,MgGa2O4,ZnGa2O4,Zn1-xMgxGa2O4,Bulk single crystal,Melt growth,Wafers,Bandgap,Transmittance Free electron concentration,Hall electron mobility
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