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Smart Slit Assembly Employing Continuously Tunable Mems Shutter

Anton Lagosh,Gergely Huszka,Hamed Sattari,Berit Ahlers,Benedikt Guldimann,Gregoire Kerr,Mauro Melozzi,Peyman Rahnama,Takeshi Nishizawa,Niels Quack

MOEMS AND MINIATURIZED SYSTEMS XX（2021）

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Key words
Smart Slit Assembly, optical MEMS, rectangular waveguide, multimode fiber
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