3D Resist Reflow Compact Model for Imagers Microlens Shape Optimization

Sebastien Berard-Bergery,Jerome Hazart,Jean-Baptiste Henry,Patrick Quemere,Charlotte Beylier,Nacima Allouti, Maryline Cordeau,Raphael Eleouet, Florian Tomaso,Alain Ostrovsky, Valerie Rousset

Design-Process-Technology Co-optimization for Manufacturability XIII（2019）

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Key words
Thermal Reflow Simulation,Microlens,3D Resist Model,Compact Model,Design Process Technology Co-Optimization
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