Contour based metrology: "make measurable what is not so"

Bertrand Le-Gratiet,Regis Bouyssou,Julien Ducote,Alain Ostrovsky,Charlotte Beylier,Christian Gardin,Nivea G. Schuch, Vincent Annezo,Loic Schneider,Matthieu Millequant,Paolo Petroni,Thiago Figueiro,Patrick Schiavone

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIV（2020）

引用 2|浏览19

暂无评分

关键词

SEM,CDSEM images,contour extraction,contour analysis,multilayer,multistep,design rules,process assumption

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要