Optical Properties of Aluminum- and Silicon-Nitride Films and Al–Si–N Nanocomposite Coatings Deposited by Reactive Magnetron Sputtering
Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques（2021）
关键词
nitrides,films,coatings,band gap,absorption coefficient,interband absorption,localized states,growth defects
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