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Fabrication of Nanopores Using the Controlled Dielectric Breakdown Technique

2021 IEEE Latin America Electron Devices Conference (LAEDC)(2021)

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摘要
Controlled dielectric breakdown is becoming the main solid-state nanopore fabrication technique worldwide. This paper presents the construction of a system for the fabrication of a single solid-state nanopore in a membrane using this technique. We include a basic introduction to nanopore theory. We also detail the building process of the low-cost equipment for nanopore fabrication, so that this paper can be used as a guide for building a similar system. Finally, we include the results of the creation of two nanopores and their characterization.
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关键词
solid-state nanopores,controlled dielectric breakdown,silicon nitride,fluidic cell,leakage current,trans-membrane,DNA & RNA sensor,DAQ,ACC
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