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Microfabrication, Coil Characterization, and Hermetic Packaging of Millimeter-Sized Free-Floating Neural Probes

Pyungwoo Yeon,Sreejith Kochupurackal Rajan,Jessica Falcone,Joe L. Gonzalez,Gary S. May,Ravi V. Bellamkonda,Oliver Brand,Muhannad S. Bakir,Maysam Ghovanloo

IEEE SENSORS JOURNAL（2021）

引用 6|浏览18
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关键词
Probes,Electrodes,Silicon,Implants,Packaging,Capacitors,Wireless communication
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