Temperature Gradient Image Analysis to Optimize an Ultrafast Regeneration of Boron–Oxygen-Related Defects

In this study, we introduce a temperature screening image analysis to investigate the temperature dependence of boron–oxygen-related defect regeneration achieved by using one sample. For that purpose, we induce a temperature gradient in a single sample over a broad temperature range in our laser-based rapid thermal processing furnace, while other influencing factors are kept constant. Spatially re...