Fabrication of Micro/nano Multifunctional Patterns on Optical Glass Through Chalcogenide Heat-Mode Resist AgInSbTe
JOURNAL OF ALLOYS AND COMPOUNDS(2021)
关键词
Chalcogenide heat-mode resist,Sub-wavelength optical element,Pattern transfer,AgInSbTe,Silica
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要