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Fabrication of superconducting through-silicon vias

Justin L. Mallek,Donna-Ruth W. Yost,Danna Rosenberg,Jonilyn L. Yoder,Gregory Calusine, Matt Cook,Rabindra Das,Alexandra Day,Evan Golden,David K. Kim,Jeffery Knecht,Bethany M. Niedzielski,Mollie Schwartz,Arjan Sevi,Corey Stull,Wayne Woods,Andrew J. Kerman,William D. Oliver

arxiv（2021）

Cited 3|Views9

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