Chrome Extension

WeChat Mini Program

Use on ChatGLM

Log in

Academic Profile User Profile

My Following Paper Collections Browse History

应用于有源芯片三维集成的小孔径高深宽比TSV刻蚀工艺

Hong Zhao,Baoxia Li, Yuliang Fang,Wenjie Wang,Wei Wu

Micronanoelectronic Technology（2020）

Cited 1|Views14

No score

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined