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双层异质结碲镉汞甚长波红外焦平面探测器研究进展

Zhen TAN,Shi-guang LIU,Zhen TIAN,Shu-fang SONG,Qing WU,Li-qing ZHOU

Infrared（2020）

Cited 1|Views4
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Abstract
报道了碲镉汞甚长波红外焦平面探测器的最新研究进展.采用水平液相外延In掺杂和垂直液相外延As掺杂技术生长了p-on-n异质结材料.基于湿法腐蚀、表侧壁钝化以及In柱互连工艺,制备了第一支台面型碲镉汞甚长波红外焦平面器件.在60 K的工作温度下,该器件的截止波长为14.28 μm,有效像元率为94.5％,平均峰值探测率为8.98×1010 cm· Hz1/2·W-1.
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