AlN/Pt/LN-Y128 Packageless Acoustic Wave Temperature Sensor

Cecile Floer,Omar Elmazria,Natalya Naumenko,Florian Bartoli,Jaafar Ghanbaja,Thierry Aubert,Sami Hage-Ali

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2021）

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III-V semiconductor materials,Aluminum nitride,Temperature sensors,Electrodes,Temperature measurement,Sensors,Substrates,Guided acoustic wave,packageless,temperature

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